Z = Distance between wafer median surface and the point halfway between the upper and lower probe (D/2).B = Distance from lower probe to bottom wafer surface.A = Distance from upper probe to top wafer surface.D = Distance between upper and lower probe face.By measuring deviations of the median surface, localized thickness variations at the center point of the wafer are removed from the calculation.Ībove shows the relationship of the wafer median surface between the two probe faces where: When measuring and calculating bow, it is important to note that the location median surface of the wafer must be known. The locus of points in the wafer equidistant between the front and back surfaces. The deviation of the center point of the median surface of a free, unclamped wafer from the median surface reference plane established by three points equally spaced on a circle with a diameter a specified amount less than the nominal diameter of the wafer. TTV = T max – T min Non-Contact Bow Measurement Following completion of the scan, TTV is calculated as follows: Thickness is calculated as follows:ĭuring an automated scanning of the wafer, a series of point measurements is taken and stored. When the wafer is placed between the probes, a new value of A and B is acquired. With the system calibrated, wafers of unknown thickness can now be measured. The total gap (Gtotal) between the upper and lower probes is then calculated as follows: The area of known thickness is placed between the probes and an upper probe to wafer gap (A) and a lower probe to wafer gap (B) is acquired. First the system must be calibrated with a wafer on known thickness (T w). By monitoring changes between the upper probe face and the upper wafer surface (A) and the bottom probe face and the bottom wafer surface (B), thickness can be calculated. I have lost my respect for Speaker,"" said DMK deputy floor leader S Duraimurugan.Figure above shows a wafer placed between two non-contact measurement probes. He could have disqualified the MLAs if they acted against the party whip during floor test, but he disqualified those who expressed their differences outside the assembly. "This is murder of democracy by the Speaker to help CM. “The EPS government acts like a demon,” he said. Vetrivel said MLAs staying in resort at Coorg in Karnataka were being intimidated by the Tamil Nadu police. We will move court seeking relief,” Vetrivel, one of the disqualified MLAs, told TOI. “The EPS govt which can't prove majority in the floor of House is resorting to disqualification of MLAs. Reacting to the decision of the speaker, TTV supporters said they would go to court against the speaker’s decision. The government needs only 108 votes to prove its majority in the assembly now in case of floor test. This means the assembly has only 215 elected members. With 18 MLAs disqualified, there are 19 seats vacant now. The assembly had 234 elected members, with RK Nagar seat which former chief minister J Jayalalithaa represented remaining vacant. The DMK has 89 members, the Congress has eight MLAs and the IUML has one member. With the disqualification of the 18 MLAs, the strength of AIADMK has come down to 116 (including the speaker). Last month, 19 MLAs met Governor C Vidyasagar Rao and gave separate letters withdrawing support to the chief minister Edappadi K Palaniswami after the EPS faction and the faction group led by former chief minister O Panneerselvam merged. However, only a few of them appeared before him despite the speaker sending notices to all a couple of times. The speaker had summoned all the rebel MLAs to appear before him. The MLAs are S Thangatamilselvan (Andipatti), R Murugan (Harur), S Mariappan Kennedy (Manamadurai), K Kadirkamu (Periyakulam), Jayanthi Padmanabhan (Gudiyattam), P Palaniappan (Pappireddypatti), V Senthil Balaji (Aravakurichi), S Muthiah (Paramakudi), P Vetrivel (Perambur), N G Pathiban (Sholingur), M Kodandapani (Tiruporur), T A Elumalai (Poonamallee), M Rengasamy (Thanjavur), R Thangadurai (Nilakottai), R Balasubramani (Ambur), S G Subramanian (Sattur), R Sundaraj (Ottapidaram) and Uma Maheswari (Vilathikulam). "The Speaker has taken action under schedule 10 of the constitution and therefore the following MLAs are disqualified and therefore they lose their MLA post," said a statement issued by assembly secretary K Boopathy on Monday morning. The MLAs were disqualified under Schedule 10 of the Indian Constitution, which deals with the anti-defection law. CHENNAI: Tamil Nadu assembly Speaker P Dhanapal on Monday disqualified 18 AIADMK MLAs who are supporting sidelined party deputy general secretary TTV Dhinakaran.
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